"Error Calibration Method Based on Perspective Mapping for Wafer Automatic ..."

Chao Meng et al. (2022)

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DOI: 10.1109/TIM.2022.3150567

access: closed

type: Journal Article

metadata version: 2022-03-15

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Chao Meng, Jinfei Shi, Fei Hao, Panyu Li:
Error Calibration Method Based on Perspective Mapping for Wafer Automatic Optical Inspection System. IEEE Trans. Instrum. Meas. 71: 1-15 (2022)

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