"Performance Verification of a 4-Axis Focus Variation Co-Ordinate Measuring ..."

Giovanni Moroni, Wahyudin P. Syam, Stefano Petrò (2017)

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DOI: 10.1109/TIM.2016.2614753

access: closed

type: Journal Article

metadata version: 2020-06-08

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Giovanni Moroni, Wahyudin P. Syam, Stefano Petrò:
Performance Verification of a 4-Axis Focus Variation Co-Ordinate Measuring System. IEEE Trans. Instrum. Meas. 66(1): 113-121 (2017)

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