"An Adaptive Fault Detection Strategy for Cz Crystal Growth Process."

Lingxia Mu et al. (2025)

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DOI: 10.1109/TIM.2025.3571110

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type: Journal Article

metadata version: 2025-07-06

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Lingxia Mu, Nan Feng, Zhenhua Zhang, Youmin Zhang, Jian Zhang:
An Adaptive Fault Detection Strategy for Cz Crystal Growth Process. IEEE Trans. Instrum. Meas. 74: 1-11 (2025)

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