"High-Precision Resistivity Measurement of Silicon Wafer Under Unstable ..."

Zilian Qu et al. (2023)

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DOI: 10.1109/TIM.2023.3323998

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type: Journal Article

metadata version: 2023-11-09

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Zilian Qu, Wensong Wang, Zhengchun Yang, Qiwen Bao, Xueli Li:
High-Precision Resistivity Measurement of Silicon Wafer Under Unstable Lift-Off Distance Using Inductive and Laser Sensors-Integrated Probe. IEEE Trans. Instrum. Meas. 72: 1-8 (2023)

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