"ESD On-Wafer Characterization: Is TLP Still the Right Measurement Tool?"

Mirko Scholz et al. (2009)

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DOI: 10.1109/TIM.2009.2017657

access: closed

type: Journal Article

metadata version: 2020-06-08

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Mirko Scholz, Dimitri Linten, Steven Thijs, Sandeep Sangameswaran, Masanori Sawada, Toshiyuki Nakaei, Takumi Hasebe, Guido Groeseneken:
ESD On-Wafer Characterization: Is TLP Still the Right Measurement Tool? IEEE Trans. Instrum. Meas. 58(10): 3418-3426 (2009)

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