"In Situ Coherence Scanning Interferometry Measurement System for ..."

Yijun Shen et al. (2025)

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DOI: 10.1109/TIM.2025.3551429

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type: Journal Article

metadata version: 2025-05-09

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Yijun Shen, Jiayu Liu, Jun Yang, Duo Li, Rong Su, Mingjun Ren, Limin Zhu:
In Situ Coherence Scanning Interferometry Measurement System for Large-Scale Rotationally Symmetric Aspheric Surfaces. IEEE Trans. Instrum. Meas. 74: 1-12 (2025)

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