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"Capacitance Measurements of Two-Dimensional and Three-Dimensional IC ..."

Michele Stucchi, Dimitrios Velenis, Guruprasad Katti (2012)

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DOI: 10.1109/TIM.2011.2179829

access: closed

type: Journal Article

metadata version: 2020-06-08

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Michele Stucchi, Dimitrios Velenis, Guruprasad Katti:
Capacitance Measurements of Two-Dimensional and Three-Dimensional IC Interconnect Structures by Quasi-Static C-V Technique. IEEE Trans. Instrum. Meas. 61(7): 1979-1990 (2012)

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