"An Electromagnetic-Piezoelectric Hybrid Actuated Nanopositioner for Atomic ..."

Lingwen Tan et al. (2024)

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DOI: 10.1109/TIM.2024.3379426

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type: Journal Article

metadata version: 2024-05-04

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Lingwen Tan, Xiangyuan Wang, Qi Yu, Bocheng Yu, Yixuan Meng, Linlin Li, Xinquan Zhang, Limin Zhu:
An Electromagnetic-Piezoelectric Hybrid Actuated Nanopositioner for Atomic Force Microscopy. IEEE Trans. Instrum. Meas. 73: 1-13 (2024)

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