"High-Performance Ellipsometry With 2-D Expanded Channels for Spectroscopy ..."

Huatian Tu et al. (2021)

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DOI: 10.1109/TIM.2021.3110323

access: closed

type: Journal Article

metadata version: 2022-01-06

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Huatian Tu, Yuxiang Zheng, Yao Shan, Yao Chen, Haotian Zhang, Pian Liu, Haibin Zhao, Rongjun Zhang, Songyou Wang, Jing Li, Hongzhu Yu, YoungPak Lee, Liangyao Chen:
High-Performance Ellipsometry With 2-D Expanded Channels for Spectroscopy and Polarization Analysis. IEEE Trans. Instrum. Meas. 70: 1-8 (2021)

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