"Research on Online Segmented Circle Fitting Algorithm Applied in Wafer ..."

Ruoyu Wang et al. (2024)

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DOI: 10.1109/TIM.2024.3450062

access: closed

type: Journal Article

metadata version: 2024-10-03

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Ruoyu Wang, Guozhi Cha, Zengyan Chen, Peng Zheng, Tundong Liu:
Research on Online Segmented Circle Fitting Algorithm Applied in Wafer Pre-Aligner. IEEE Trans. Instrum. Meas. 73: 1-10 (2024)

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