"A General Method to Accurately Measure the Thin-Film Sheet Resistance for ..."

Xingyi Wu et al. (2021)

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DOI: 10.1109/TIM.2021.3109390

access: closed

type: Journal Article

metadata version: 2021-09-20

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Xingyi Wu, Yijie Dai, Chen Fu, Xiaobo Zhu, Wenhua Gu, Daying Sun, Wen Wu, Xiaodong Huang, Zhongxiang Shen:
A General Method to Accurately Measure the Thin-Film Sheet Resistance for Sensors. IEEE Trans. Instrum. Meas. 70: 1-9 (2021)

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