"Toughness Measurement of Microscale Coating/Silicon MEMS System Using ..."

Yuanlin Xia et al. (2024)

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DOI: 10.1109/TIM.2024.3403192

access: closed

type: Journal Article

metadata version: 2024-10-03

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Yuanlin Xia, Yuan Liu, Yinfeng Xia, Wenfeng Liu, Cao Xia, Jiaxing Tan, Zhuqing Wang:
Toughness Measurement of Microscale Coating/Silicon MEMS System Using Pillar Splitting Method. IEEE Trans. Instrum. Meas. 73: 1-11 (2024)

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