"Determination of Thermal Conductivities for Thin-Film Materials in CMOS ..."

Wei Xu et al. (2021)

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DOI: 10.1109/TIM.2020.3029361

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type: Journal Article

metadata version: 2025-08-16

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Wei Xu, Xiaoyi Wang, Xiaojin Zhao, Yatao Yang, Yi-Kuen Lee:
Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process. IEEE Trans. Instrum. Meas. 70: 1-9 (2021)

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