"Electromechanical Measurements and Modeling of a High-Performance ..."

Xi Zeng et al. (2025)

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DOI: 10.1109/TIM.2025.3566836

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type: Journal Article

metadata version: 2025-06-11

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Xi Zeng, Nicolas André, Eléonore Masarweh, Ottilie Bonfanti, Denis Flandre:
Electromechanical Measurements and Modeling of a High-Performance Small-Area Ultra-Thin SOI MEMS Piezoresistive Pressure Sensor. IEEE Trans. Instrum. Meas. 74: 1-9 (2025)

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