"Noncontact Subnanometer Resolution Displacement Sensing With Wide ..."

Shenghang Zhai et al. (2023)

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DOI: 10.1109/TIM.2023.3314817

access: closed

type: Journal Article

metadata version: 2023-10-14

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Shenghang Zhai, Jialin Shi, Peng Yu, Tie Yang, Yang Yang, Chanmin Su, Lianqing Liu:
Noncontact Subnanometer Resolution Displacement Sensing With Wide Bandwidth Based on Squeeze Film Damping Effect. IEEE Trans. Instrum. Meas. 72: 1-11 (2023)

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