"Research on the Nested Package Structure of a MEMS Vector Hydrophone."

Jie Zhang et al. (2024)

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DOI: 10.1109/TIM.2024.3370754

access: closed

type: Journal Article

metadata version: 2025-08-26

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Jie Zhang, Guojun Zhang, Yanan Geng, Weirong Ren, Shan Zhu, Guochang Liu, Yan Liu, Li Jia, Xiangzheng Kong, Jiangjiang Wang, Wendong Zhang:
Research on the Nested Package Structure of a MEMS Vector Hydrophone. IEEE Trans. Instrum. Meas. 73: 1-13 (2024)

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