"Statistical-Analysis-Based Imaging-Free Method for Efficient and Fast ..."

Xiang Zhong et al. (2025)

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DOI: 10.1109/TIM.2025.3565066

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type: Journal Article

metadata version: 2025-08-09

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Xiang Zhong, Yu Sun, Guangcheng Zhou, Yujia Liu, Yikai Zhu, Huaxia Deng, Mengchao Ma, Dong Chen, Xinglong Gong:
Statistical-Analysis-Based Imaging-Free Method for Efficient and Fast Wafer Defect Detection. IEEE Trans. Instrum. Meas. 74: 1-6 (2025)

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