"A Reflective-Type Heterodyne Grating Interferometer for ..."

Junhao Zhu et al. (2022)

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DOI: 10.1109/TIM.2022.3213005

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type: Journal Article

metadata version: 2022-11-13

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Junhao Zhu, Guochao Wang, Shengtong Wang, Xinghui Li:
A Reflective-Type Heterodyne Grating Interferometer for Three-Degree-of-Freedom Subnanometer Measurement. IEEE Trans. Instrum. Meas. 71: 1-9 (2022)

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