"Data-driven clustering learning modeling for semiconductor silicon single ..."

Yu-Yu Liu, Ding Liu, Zezhong Song (2025)

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DOI: 10.1177/01423312241265281

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type: Journal Article

metadata version: 2025-09-11

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Yu-Yu Liu, Ding Liu, Zezhong Song:
Data-driven clustering learning modeling for semiconductor silicon single crystal growth process based on fuzzy C-means and DBN. Trans. Inst. Meas. Control 47(9): 1748-1761 (2025)

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