"Library-Based Illumination Synthesis for Critical CMOS Patterning."

Jue-Chin Yu, Peichen Yu, Hsueh-Yung Chao (2013)

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DOI: 10.1109/TIP.2013.2253482

access: closed

type: Journal Article

metadata version: 2020-05-10

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Jue-Chin Yu, Peichen Yu, Hsueh-Yung Chao:
Library-Based Illumination Synthesis for Critical CMOS Patterning. IEEE Trans. Image Process. 22(7): 2811-2821 (2013)

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