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"An Evolutionary Approach to Process Control with Application to Lithography."

Jerome Doutriaux, Abrahim Lavi (1974)

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DOI: 10.1109/TSMC.1974.5409112

access: closed

type: Journal Article

metadata version: 2020-05-20

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  - https://dblp.org/rec/journals/tsmc/DoutriauxL74
Jerome Doutriaux, Abrahim Lavi:
An Evolutionary Approach to Process Control with Application to Lithography. IEEE Trans. Syst. Man Cybern. 4(2): 176-185 (1974)

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