"A Survey of Modeling and Control Techniques for Micro- and ..."

Antoine Ferreira, Sumeet S. Aphale (2011)

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DOI: 10.1109/TSMCC.2010.2072779

access: closed

type: Journal Article

metadata version: 2020-05-21

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Antoine Ferreira, Sumeet S. Aphale:
A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems. IEEE Trans. Syst. Man Cybern. Part C 41(3): 350-364 (2011)

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