"A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster ..."

ChunRong Pan et al. (2015)

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DOI: 10.1109/TSMC.2014.2368995

access: closed

type: Journal Article

metadata version: 2025-11-08

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ChunRong Pan, Yan Qiao, Naiqi Wu, MengChu Zhou:
A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation. IEEE Trans. Syst. Man Cybern. Syst. 45(5): 805-818 (2015)

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