"Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with ..."

Yan Qiao, Naiqi Wu, MengChu Zhou (2015)

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DOI: 10.1109/TSMC.2014.2347928

access: closed

type: Journal Article

metadata version: 2025-11-08

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Yan Qiao, Naiqi Wu, MengChu Zhou:
Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Residency Time Constraints Based on a Novel Schedule. IEEE Trans. Syst. Man Cybern. Syst. 45(3): 472-484 (2015)

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