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"Efficient Approach to Failure Response of Process Module in Dual-Arm ..."
Yan Qiao et al. (2021)
- Yan Qiao
, SiWei Zhang, NaiQi Wu
, MengChu Zhou
, ZhiWu Li, Ting Qu
:
Efficient Approach to Failure Response of Process Module in Dual-Arm Cluster Tools With Wafer Residency Time Constraints. IEEE Trans. Syst. Man Cybern. Syst. 51(3): 1612-1629 (2021)
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