"Process Mining Applied to the Test Process of Wafer Scanners in ASML."

Anne Rozinat et al. (2009)

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DOI: 10.1109/TSMCC.2009.2014169

access: closed

type: Journal Article

metadata version: 2020-05-21

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Anne Rozinat, Ivo S. M. de Jong, Christian W. Günther, Wil M. P. van der Aalst:
Process Mining Applied to the Test Process of Wafer Scanners in ASML. IEEE Trans. Syst. Man Cybern. Part C 39(4): 474-479 (2009)

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