"Optimal Scheduling of Single-Armed Cluster Tools With Two Wafer Types and ..."

Fajun Yang et al. (2025)

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DOI: 10.1109/TSMC.2025.3571733

access: closed

type: Journal Article

metadata version: 2025-08-09

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Fajun Yang, Chao Li, Chunjiang Zhang, NaiQi Wu:
Optimal Scheduling of Single-Armed Cluster Tools With Two Wafer Types and Chamber Cleaning. IEEE Trans. Syst. Man Cybern. Syst. 55(8): 5607-5618 (2025)

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