"Efficient Approach to Scheduling of Transient Processes for ..."

FaJun Yang et al. (2020)

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DOI: 10.1109/TSMC.2018.2852724

access: closed

type: Journal Article

metadata version: 2025-11-07

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  - https://dblp.org/rec/journals/tsmc/YangQGWZSS20
FaJun Yang, Yan Qiao, Kaizhou Gao, Naiqi Wu, Yuting Zhu, Ian Ware Simon, Rong Su:
Efficient Approach to Scheduling of Transient Processes for Time-Constrained Single-Arm Cluster Tools With Parallel Chambers. IEEE Trans. Syst. Man Cybern. Syst. 50(10): 3646-3657 (2020)

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