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"Optimal One-Wafer Cyclic Scheduling of Time-Constrained Hybrid ..."

FaJun Yang et al. (2017)

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DOI: 10.1109/TSMC.2016.2531697

access: closed

type: Journal Article

metadata version: 2020-05-20

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  - https://dblp.org/rec/journals/tsmc/YangWQZ17
FaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou:
Optimal One-Wafer Cyclic Scheduling of Time-Constrained Hybrid Multicluster Tools via Petri Nets. IEEE Trans. Syst. Man Cybern. Syst. 47(11): 2920-2932 (2017)

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