"Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition ..."

FaJun Yang et al. (2017)

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DOI: 10.1109/TSMC.2015.2507140

access: closed

type: Journal Article

metadata version: 2025-11-08

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FaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou, ZhiWu Li:
Scheduling of Single-Arm Cluster Tools for an Atomic Layer Deposition Process With Residency Time Constraints. IEEE Trans. Syst. Man Cybern. Syst. 47(3): 502-516 (2017)

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