"Scheduling Single-Arm Multicluster Tools for Two-Type Wafers With ..."

Qinghua Zhu et al. (2023)

> Home

Details and statistics

DOI: 10.1109/TSMC.2023.3280207

access: closed

type: Journal Article

metadata version: 2025-11-07

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tsmc/ZhuWWQHZZ23
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tsmc/ZhuWWQHZZ23
Qinghua Zhu, GengHong Wang, NaiQi Wu, Yan Qiao, Yan Hou, MengChu Zhou, Side Zhao:
Scheduling Single-Arm Multicluster Tools for Two-Type Wafers With Lower-Bound Cycle Time. IEEE Trans. Syst. Man Cybern. Syst. 53(11): 6658-6671 (2023)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.