"A position recognition algorithm for semiconductor alignment based on ..."

Hiroshi Sakou et al. (1989)

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DOI: 10.1109/29.45557

access: closed

type: Journal Article

metadata version: 2020-05-19

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Hiroshi Sakou, Takafumi Miyatake, Seiji Kashioka, Masakazu Ejiri:
A position recognition algorithm for semiconductor alignment based on structural pattern matching. IEEE Trans. Acoust. Speech Signal Process. 37(12): 2148-2157 (1989)

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