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"Litho-Friendly Decomposition Method for Self-Aligned Double Patterning."
Minoo Mirsaeedi, Andres J. Torres, Mohab H. Anis (2013)
- Minoo Mirsaeedi, Andres J. Torres, Mohab H. Anis:
Litho-Friendly Decomposition Method for Self-Aligned Double Patterning. IEEE Trans. Very Large Scale Integr. Syst. 21(8): 1469-1480 (2013)
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