"The Combination of Equipment Scale and Feature Scale Models for Chemical ..."

Matthias K. Gobbert, Timothy S. Cale, Christian A. Ringhofer (1998)

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DOI: 10.1155/1998/24073

access: open

type: Journal Article

metadata version: 2023-05-08

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Matthias K. Gobbert, Timothy S. Cale, Christian A. Ringhofer:
The Combination of Equipment Scale and Feature Scale Models for Chemical Vapor Deposition Via a Homogenization Technique. VLSI Design 6(1-4): 399-403 (1998)

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