"Hf-Based High-k Dielectrics: Process Development, Performance ..."

Young-Hee Kim, Jack C. Lee (2006)

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DOI: 10.2200/S00005ED1V01Y200508SSM001

access: closed

type: Book or Thesis

metadata version: 2023-11-06

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Young-Hee Kim, Jack C. Lee:
Hf-Based High-k Dielectrics: Process Development, Performance Characterization, and Reliability. Synthesis Lectures on Solid State Materials and Devices, Morgan & Claypool Publishers 2006, ISBN 978-3-031-01424-6

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