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@inproceedings{DBLP:conf/nems/BaiZ17,
  author    = {Minyu Bai and
               Yulong Zhao},
  title     = {Electrostatic force research concerning material property and electric
               condition by simulation and experiment},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {535--538},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017079},
  doi       = {10.1109/NEMS.2017.8017079},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BaiZ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}

@phdthesis{DBLP:phd/ndltd/Gupta97,
  author    = {Raj K. Gupta},
  title     = {Electrostatic pull-in test structure design for in-situ mechanical
               property measurements of microelectromechanical systems {(MEMS)}},
  school    = {Massachusetts Institute of Technology, Cambridge, MA, {USA}},
  year      = {1997},
  url       = {http://hdl.handle.net/1721.1/10454},
  timestamp = {Tue, 25 Apr 2017 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/phd/ndltd/Gupta97.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}

@phdthesis{DBLP:phd/ndltd/Osterberg95,
  author    = {Peter M. Osterberg},
  title     = {Electrostatically actuated microelectromechanical test structures
               for material property measurement},
  school    = {Massachusetts Institute of Technology, Cambridge, MA, {USA}},
  year      = {1995},
  url       = {http://hdl.handle.net/1721.1/11097},
  timestamp = {Mon, 08 May 2017 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/phd/ndltd/Osterberg95.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}