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"Bond Strength Optimization of Plasma Activated Low Temperature Oxide-Oxide ..."
Patrick Krüger, Thomas Voß, Matthias Wietstruck (2021)
- Patrick Krüger, Thomas Voß, Matthias Wietstruck:
Bond Strength Optimization of Plasma Activated Low Temperature Oxide-Oxide Fusion Bonding Through Thermocycling. 3DIC 2021: 1-5
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