"Design, characterization, and control of a monolithic three-axis ..."

Brian J. Kenton, Kam K. Leang (2010)

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DOI: 10.1109/ACC.2010.5530933

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

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Brian J. Kenton, Kam K. Leang:
Design, characterization, and control of a monolithic three-axis high-bandwidth nanopositioning stage. ACC 2010: 4949-4956

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