"Design, identification and control of a fast nanopositioning device."

Salpax Salapaka et al. (2002)

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DOI: 10.1109/ACC.2002.1023923

access: closed

type: Conference or Workshop Paper

metadata version: 2022-07-26

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Salpax Salapaka, Abu Sebastian, Jason P. Cleveland, Murti V. Salapaka:
Design, identification and control of a fast nanopositioning device. ACC 2002: 1966-1971

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