"A fast machine learning-based mask printability predictor for OPC ..."

Bentian Jiang et al. (2019)

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DOI: 10.1145/3287624.3287682

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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Bentian Jiang, Hang Zhang, Jinglei Yang, Evangeline F. Y. Young:
A fast machine learning-based mask printability predictor for OPC acceleration. ASP-DAC 2019: 412-419

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