"Performance Evaluation and Schedule Optimization of Multi-Cluster Tools ..."

Shengwei Ding et al. (2006)

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DOI: 10.1109/COASE.2006.326864

access: closed

type: Conference or Workshop Paper

metadata version: 2020-09-05

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Shengwei Ding, Jingang Yi, Mike Tao Zhang, Raha Akhavan-Tabatabaei:
Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty. CASE 2006: 112-117

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