"Modeling and identification of the dynamics of electrostatically actuated ..."

Pranav Agarwal et al. (2008)

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DOI: 10.1109/CDC.2008.4739363

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-09

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Pranav Agarwal, Deepak R. Sahoo, Abu Sebastian, Haralampos Pozidis, Murti V. Salapaka:
Modeling and identification of the dynamics of electrostatically actuated microcantilever with integrated thermal sensor. CDC 2008: 2624-2630

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