"Impact of intermediate BEOL technology on standard cell performances of 3D ..."

Melanie Brocard et al. (2016)

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DOI: 10.1109/ESSDERC.2016.7599625

access: closed

type: Conference or Workshop Paper

metadata version: 2022-01-12

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Melanie Brocard, Guillaume Berhault, Sébastien Thuries, Fabien Clermidy, Perrine Batude, Claire Fenouillet-Béranger, Laurent Brunet, François Andrieu, Fabien Deprat, Joris Lacord, Olivier Rozeau, Gerald Cibrario, Olivier Billoint:
Impact of intermediate BEOL technology on standard cell performances of 3D VLSI. ESSDERC 2016: 218-221

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