"Dopant diffusion and segregation, Si-Ge interdiffusion and defect ..."

Guangrui Xia (2017)

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DOI: 10.1109/ESSDERC.2017.8066646

access: closed

type: Conference or Workshop Paper

metadata version: 2017-10-19

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Guangrui Xia:
Dopant diffusion and segregation, Si-Ge interdiffusion and defect engineering in SiGe devices. ESSDERC 2017: 280-283

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