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"Nanorobotic AFM/SEM/FIB system for processing, manipulation and ..."
Sergej Fatikow et al. (2013)
- Sergej Fatikow, Volkmar Eichhorn, Malte Bartenwerfer, Florian Krohs:
Nanorobotic AFM/SEM/FIB system for processing, manipulation and characterization of nanomaterials. ETFA 2013: 1-4
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