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ORCID"A new algorithm for layout of dark field alternating phase shifting masks."
Qinglang Luo et al. (2005)
- Qinglang Luo, Xianlong Hong, Qiang Zhou, Yici Cai:
A new algorithm for layout of dark field alternating phase shifting masks. ACM Great Lakes Symposium on VLSI 2005: 221-224
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