"Novel wire density driven full-chip routing for CMP variation control."

Huang-Yu Chen et al. (2007)

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DOI: 10.1109/ICCAD.2007.4397368

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Huang-Yu Chen, Szu-Jui Chou, Sheng-Lung Wang, Yao-Wen Chang:
Novel wire density driven full-chip routing for CMP variation control. ICCAD 2007: 831-838

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