"A novel intensity based optical proximity correction algorithm with ..."

Peng Yu, David Z. Pan (2007)

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DOI: 10.1109/ICCAD.2007.4397371

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Peng Yu, David Z. Pan:
A novel intensity based optical proximity correction algorithm with speedup in lithography simulation. ICCAD 2007: 854-859

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