"First Demonstration of BEOL-compatible Amorphous InGaZnOx Channel ..."

Zijie Zheng et al. (2023)

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DOI: 10.1109/ICICDT59917.2023.10332300

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-03

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Zijie Zheng, Jiawei Xie, Yiyuan Sun, Ying Xu, Xiaolin Wang, Leming Jiao, Zuopu Zhou, Qiwen Kong, Yue Chen, Xiao Gong:
First Demonstration of BEOL-compatible Amorphous InGaZnOx Channel Antiferroelectric (Hf0.2Zr0.8O2)-Enhanced Floating Gate Memory. ICICDT 2023: 29-33

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