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"An Overview on Hybrid Integrator-Gain Systems with applications to Wafer ..."

Marcel Heertjes, Sebastiaan van den Eijnden, Bardia Sharif (2023)

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DOI: 10.1109/ICM54990.2023.10102062

access: closed

type: Conference or Workshop Paper

metadata version: 2023-04-25

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  - conf/icmech/HeertjesES23
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Marcel Heertjes, Sebastiaan van den Eijnden, Bardia Sharif:
An Overview on Hybrid Integrator-Gain Systems with applications to Wafer Scanners. ICM 2023: 1-8

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